Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms

Title
Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 1, Pages 015007
Publisher
IOP Publishing
Online
2009-11-21
DOI
10.1088/0960-1317/20/1/015007

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