Focused ion beam irradiation effects on nanoscale freestanding thin films

Published 2008 View Full Article

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Title
Focused ion beam irradiation effects on nanoscale freestanding thin films
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 9, Pages 095005
Publisher
IOP Publishing
Online
2008-07-25
DOI
10.1088/0960-1317/18/9/095005

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