Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 10, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/18/10/105012
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Funding
- National Science Foundation [CTS-0404370]
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In this paper we present the evaluation of contact materials for a MEMS thermal switch. The contact materials considered were liquid-metal micro-droplets and aligned carbon nanotube arrays. Five switch configurations were tested. The thermal interfacial resistance of the switches was measured. The liquid metal switch had a minimum thermal interfacial resistance of 1.1 mm(2) K W-1. The minimum thermal interfacial resistance of the best carbon nanotube thermal switch was 20.4 mm(2) K W-1. The ratio of the switch off to on thermal resistance was measured for each configuration. Based on these measurements, a switch incorporating liquid-metal droplets is found to be superior to switches incorporating aligned carbon nanotubes.
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