The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator

Published 2008 View Full Article

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Title
The design, fabrication and characterization of a silicon microheater for an integrated MEMS gas preconcentrator
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 12, Pages 125001
Publisher
IOP Publishing
Online
2008-10-24
DOI
10.1088/0960-1317/18/12/125001

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