A hierarchical structure through imprinting of a polyimide precursor without residual layers

Published 2008 View Full Article

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Title
A hierarchical structure through imprinting of a polyimide precursor without residual layers
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 10, Pages 105005
Publisher
IOP Publishing
Online
2008-08-28
DOI
10.1088/0960-1317/18/10/105005

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