A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor

Published 2008 View Full Article

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Title
A bulk acoustic mode single-crystal silicon microresonator with a high-quality factor
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 064001
Publisher
IOP Publishing
Online
2008-05-14
DOI
10.1088/0960-1317/18/6/064001

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