SU-8 submicrometric sieves recorded by UV interference lithography

Published 2008 View Full Article

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Title
SU-8 submicrometric sieves recorded by UV interference lithography
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 11, Pages 115003
Publisher
IOP Publishing
Online
2008-09-20
DOI
10.1088/0960-1317/18/11/115003

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