Article
Automation & Control Systems
Mir Akmam Noor Rashid, Tanveer Saleh, Wazed Ibne Noor, Mohamed Sultan Mohamed Ali
Summary: The experimental investigation on the application of LBMM-mu EDM technique on stainless steel revealed the significant influence of laser input parameters, particularly scanning speed and power, on the performance of mu EDM. It was found that adjusting these laser parameters could either slow down or speed up the mu EDM processing time. The sequential machining technique was shown to reduce machining time, tool wear, and instability, while maintaining hole quality, compared to pure mu EDM process.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2021)
Article
Chemistry, Analytical
Weijing Kong, Ziyu Liu, Rudong Zhang, Yongbin Zeng
Summary: With the development of MEMS, there is an increasing demand for machining difficult-to-machine metal micro parts. Microelectric discharge machining is effective but causes recast layers. In this study, we propose wire electrochemical discharge micro-machining (WECDMM) with a new electrolyte system to remove recast layers. We optimize the electrolyte and analyze the effects of process parameters on machining quality.
Article
Engineering, Electrical & Electronic
Yingli Shi, Chao Zhou, Zibo Cao, Yurong He, Jingwen Guo, Chunxin Li, Qianhong Wu, Kui Liang, Yanzhao Li, Yuan Lin
Summary: This paper presents a design and manufacturing method of a flexible radio-frequency microelectromechanical system switch, which can be used in satellite communication. Through simulation analysis, it is found that the switch can maintain RF performance at certain bending radius. It is demonstrated that the switch is insensitive to bending deformation and has stable RF performance.
NPJ FLEXIBLE ELECTRONICS
(2022)
Article
Chemistry, Analytical
Marian Gilewski
Summary: This article discusses the application considerations in the optical sensor of a micro-electro-mechanical system (MEMS). The analysis provided is limited to application issues encountered in research or industrial applications. The article focuses on a case where the sensor is used as a feedback signal source to stabilize the flux of an LED lamp. The main challenge in using such sensors is the conditioning of the output analog signal for further digital processing.
Article
Physics, Applied
C. Morelle, D. Theron, I. Roch-Jeune, P. Tilmant, E. Okada, F. Vaurette, B. Grimbert, J. Derluyn, S. Degroote, M. Germain, M. Faucher
Summary: We present an accelerometer micro-sensor utilizing epitaxial gallium nitride and silicon. The device consists of a vibrating beam accelerometer fabricated using micro-electro-mechanical-system technology on an AlGaN/GaN heterostructure grown on a silicon substrate. The vibrating GaN beam incorporates high electron mobility transducers, while a high aspect ratio proof mass is engineered in the silicon substrate. Our research investigates the sensor response in various modes, showing a scale factor of up to 160 Hz/g, which exhibits an unconventional dependence on the mode number. To explain this, we propose an analytical model considering the built-in stress during epitaxy. This proof-of-concept device opens up possibilities for inertial sensors utilizing the properties of GaN.
APPLIED PHYSICS LETTERS
(2023)
Review
Chemistry, Analytical
Giorgio De Pasquale
Summary: Additive manufacturing (AM) processes at the micrometer range are undergoing intense development recently, with efforts to integrate them with traditional MEMS fabrication processes and to develop specific design methods for this field. Despite the abundance of documentation on process attempts, setup details, and case studies, organized analysis of the specific and comparative advantages, constraints, and limitations of AM methods for microstructures is necessary due to the diverse variety of processes and materials.
Review
Multidisciplinary Sciences
Ida Hamidah, Roer Eka Pawinanto, Budi Mulyanti, Jumril Yunas
Summary: The research on MEMS energy harvester has been rapidly growing, with a focus on analyzing the impact of research activities in the field. The study identified China as the leading country in conducting projects related to MEMS energy harvesters, while the Journal of MEMS and Journal of Micromechanics and Microengineering are the top journals publishing reports on research progress in this area. The analysis highlights potential future research areas, including the use of new materials, new structures, and optimization of vibration concepts for MEMS energy harvesters.
Article
Chemistry, Physical
Jacek Skiba, Mariusz Kulczyk, Sylwia Przybysz-Gloc, Monika Skorupska, Julita Smalc-Koziorowska, Mariusz Kobus, Kamil Nowak
Summary: This paper presents research on optimizing the unconventional plastic forming process of a copper alloy (CuCrZr) through hydrostatic extrusion (HE) and post-processing heat treatment. The study found that the post-processing treatment resulted in an improved microstructure, significantly increased hardness and strength, and maintained high electrical conductivity, thereby reducing electrode wear in the EDM process. The best results were obtained with a five-stage HE process combined with aging at 480 degrees C for 1 hour, reducing electrical discharge wear by over 50% compared to non-deformed copper electrodes.
Article
Computer Science, Artificial Intelligence
Ardashir Mohammadzadeh, Reza Hadjiaghaie Vafaie
Summary: This study proposes a new fuzzy logic controller for MEMS gyroscopes, utilizing deep learning and optimization to address nonlinearities and unknown dynamics, demonstrating superior performance through multiple simulations and comparisons.
APPLIED SOFT COMPUTING
(2021)
Article
Automation & Control Systems
Yi Xu, Baoyang Jiang
Summary: Electrochemical discharge machining (ECDM) is a technology used for micromachining of non-conductive materials, but deep micro hole drilling encounters problems due to bubble accumulation at the entrance hole; recent research shows that improving electrolyte circulation through the magnetohydrodynamic effect can enhance machining efficiency.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2021)
Article
Engineering, Electrical & Electronic
Zhixin A. Ye, Sergio F. Almeida, Urmita Sikder, Xiaoer Hu, Tsegereda K. Esatu, Kathy Le, Jaeseok Jeon, Tsu-Jae King Liu
Summary: Micro-electro-mechanical relays with multiple gate electrodes, operated with a tunable body bias voltage, are investigated for more compact and energy-efficient implementation of digital logic circuits. Specifically, it is demonstrated that a relay design with three gate electrodes of equal area is capable of performing different digital logic functions by adjusting the body bias voltage.
IEEE ELECTRON DEVICE LETTERS
(2021)
Article
Chemistry, Analytical
Timur Rizovich Ablyaz, Evgeny Sergeevich Shlykov, Karim Ravilevich Muratov, Sarabjeet Singh Sidhu
Summary: This study focuses on the wire-cut electro-discharge machining of polymer composite material (PCM) and demonstrates that by improving the workpiece conductivity and selecting appropriate process parameters, the cut-width accuracy can be significantly enhanced. Analysis of variance reveals that voltage and pulse duration play a crucial role in determining the cut-width, and the developed theoretical model proves to be effective within an acceptable range.
Article
Automation & Control Systems
Qi Jing, Yongbin Zhang, Lingbao Kong, Min Xu, Fang Ji
Summary: The study investigated the effects of increased power and frequency on the machining characteristics of very high-frequency micro-electrical discharge machining (VHF micro-EDM), revealing that higher power leads to higher material removal rate (MRR) at the same frequency. Furthermore, at the same power, both MRR and the size of discharge craters increase and then decrease with frequency, peaking at 65 MHz. Additionally, experimental results showed that the optimal processing surface was achieved at 110 MHz frequency and 8.0 W total power for a copper workpiece.
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
(2022)
Article
Chemistry, Physical
Shuliang Dong, Hongchao Ji, Jian Zhou, Xianzhun Li, Lan Ding, Zhenlong Wang
Summary: Micro-liquid floated gyroscopes are widely used in military applications. However, the machining of micro-ball sockets in beryllium copper alloy is challenging due to its excellent properties. In this study, we developed a method for milling micro-ball sockets in C17200 beryllium copper alloy using micro-electrical discharge machining, achieving high precision by optimizing the machining parameters. This method provides a new way to fabricate micro-ball sockets in C17200 with high efficiency for micro-liquid floated gyroscopes.
Article
Energy & Fuels
Sen Zhang, Xiaoping Liao
Summary: A novel power supply for IoT in industrial fields is proposed, utilizing a MEMS-based integrated energy harvester with test structures. A metal heat sink is fabricated at the center of the harvester for thermoelectric gathering, while a photoelectric harvester is integrated at the back. Parameter test structures are designed to explain the impact of external and internal parameters on performance, revealing a relationship between the length and width of the thermocouple and the maximum output power factor.