An interconnect for out-of-plane assembled biomedical probe arrays

Title
An interconnect for out-of-plane assembled biomedical probe arrays
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 064004
Publisher
IOP Publishing
Online
2008-05-14
DOI
10.1088/0960-1317/18/6/064004

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