Numerical and experimental study of gas flows in 2D and 3D microchannels

Title
Numerical and experimental study of gas flows in 2D and 3D microchannels
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 2, Pages 025034
Publisher
IOP Publishing
Online
2008-01-18
DOI
10.1088/0960-1317/18/2/025034

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