Fabrication of a bubble-driven arrayed actuator for a tactile display

Title
Fabrication of a bubble-driven arrayed actuator for a tactile display
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 6, Pages 065012
Publisher
IOP Publishing
Online
2008-05-07
DOI
10.1088/0960-1317/18/6/065012

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