Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe

Title
Non-impact deposition for electrostatic micromanipulation of a conductive particle by a single probe
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 10, Pages 107001
Publisher
IOP Publishing
Online
2008-09-16
DOI
10.1088/0960-1317/18/10/107001

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