A study of angular effects in focused ion beam milling of water ice

Published 2008 View Full Article

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Title
A study of angular effects in focused ion beam milling of water ice
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 9, Pages 095010
Publisher
IOP Publishing
Online
2008-07-30
DOI
10.1088/0960-1317/18/9/095010

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