Micro-/nano-lithography based on the contact transfer of thin film and mask embedded etching

Published 2008 View Full Article

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Title
Micro-/nano-lithography based on the contact transfer of thin film and mask embedded etching
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 7, Pages 075013
Publisher
IOP Publishing
Online
2008-06-03
DOI
10.1088/0960-1317/18/7/075013

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