Mechanical Behavior and Anisotropy of Spin-Coated SU-8 Thin Films for MEMS

Authors

Keywords

Journal

Volume 23, Issue 1, Pages 168-180

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2013-07-12

DOI

10.1109/jmems.2013.2264341

Explore over 38,000 international journals covering a vast array of academic fields.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started