Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications

Title
Flexible Implantable Microtemperature Sensor Fabricated on Polymer Capillary by Programmable UV Lithography With Multilayer Alignment for Biomedical Applications
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 1, Pages 21-29
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-07-05
DOI
10.1109/jmems.2013.2269674

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