Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation

Published 2014 View Full Article

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Title
Foil-Level Inkjet-Printed pyroMEMS Balloon Actuators: Fabrication, Modeling, and Validation
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 6, Pages 1417-1427
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-06-05
DOI
10.1109/jmems.2014.2314702

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