Electrostatic Side-Drive Rotary Stage on Liquid-Ring Bearing

Title
Electrostatic Side-Drive Rotary Stage on Liquid-Ring Bearing
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 1, Pages 147-156
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-07-10
DOI
10.1109/jmems.2013.2262592

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