Thermocapillary Actuation of Millimeter-Scale Rotary Structures

Published 2013 View Full Article

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Title
Thermocapillary Actuation of Millimeter-Scale Rotary Structures
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 2, Pages 494-499
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-09-24
DOI
10.1109/jmems.2013.2281328

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