RF MEMS Switches With $\hbox{RuO}_{2}$ –$\hbox{Au}$ Contacts Cycled to 10 Billion Cycles

Characterization of Contact Resistance Stability in MEM Relays With Tungsten Electrodes

(2012) Yenhao Chen et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

An improved SPM-based contact tester for the study of microcontacts

(2012) L Chen et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Lifetime limitations of ohmic, contacting RF MEMS switches with Au, Pt and Ir contact materials due to accumulation of ‘friction polymer’ on the contacts

(2012) David A Czaplewski et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Microstructure evolution of gold thin films under spherical indentation for micro switch contact applications

(2011) Brice Arrazat et al.   JOURNAL OF MATERIALS SCIENCE

Miniature MEMS Switches for RF Applications

(2011) Romain Stefanini et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Improving performance of the metal-to-metal contact RF MEMS switch with a Pt–Au microspring contact design

(2011) Bo Liu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Mechanical Computing Redux: Relays for Integrated Circuit Applications

(2010) Vincent Pott et al.   PROCEEDINGS OF THE IEEE

A nanomechanical switch for integration with CMOS logic

(2009) David A Czaplewski et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Lifetime Measurements on a High-Reliability RF-MEMS Contact Switch

(2008) H.S. Newman et al.   IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS

Investigation of Similar and Dissimilar Metal Contacts for Reliable Radio Frequency Micorelectromechanical Switches

(2008) Hyouk Kwon et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Minimum Energy Actuation and Bounce-Back Behavior of Microbeams Using $\delta$ Voltage Pulses

(2008) Yuyan Wang et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm

(2008) Feixiang Ke et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS