Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 22, Issue 1, Pages 4-6Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2012.2226934
Keywords
Curved artificial compound eyes (ACEs) (CACEs); microelectromechanical systems (MEMS); multiangle images; Parylene-C
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Funding
- National Natural Science Foundation of China [51035005]
- Science and Technology Department of Shanghai [11JC1405700, 11DZ2290203]
- Program for New Century Excellent Talents in University
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(Curved artificial compound eyes (CACEs) are fabricated using microscale replication, stamping, and casting processes to form deposited 2-D microlens-pattern composite films into 3-D structures. The films are made up of polydimethylsiloxane (PDMS)-Parylene-C-PDMS layers. The layers are used for pattern replication, isolation, and buffering, respectively. The effect of the buffer layer on the ultimate 3-D structure is discussed. Multiple images of the human face in lateral-and axial-motion modes are obtained by these CACE prototypes. These images are used to evaluate the capability of the CACE to acquire multiangle images. The results give evidence that CACEs can potentially produce stereovision in microoptical systems.
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