Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures

Title
Characterization of Adhesion Force in MEMS at High Temperature Using Thermally Actuated Microstructures
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 3, Pages 541-548
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-03-24
DOI
10.1109/jmems.2012.2189363

Ask authors/readers for more resources

Find Funding. Review Successful Grants.

Explore over 25,000 new funding opportunities and over 6,000,000 successful grants.

Explore

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now