Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications

Title
Electrothermal Microactuators With Peg Drive Improve Performance for Brain Implant Applications
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 5, Pages 1172-1186
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-07-14
DOI
10.1109/jmems.2012.2203789

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