A Three-Axis CMOS-MEMS Accelerometer Structure With Vertically Integrated Fully Differential Sensing Electrodes

Authors

Keywords

Journal

Volume 21, Issue 6, Pages 1329-1337

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2012-07-21

DOI

10.1109/jmems.2012.2205904

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started