Design and Fabrication of Addressable Microfluidic Energy Storage MEMS Device

Published 2012 View Full Article

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Title
Design and Fabrication of Addressable Microfluidic Energy Storage MEMS Device
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 6, Pages 1392-1401
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-08-02
DOI
10.1109/jmems.2012.2208218

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