Laser-Driven Micro Transfer Placement of Prefabricated Microstructures

Published 2012 View Full Article

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Title
Laser-Driven Micro Transfer Placement of Prefabricated Microstructures
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 5, Pages 1049-1058
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-09-29
DOI
10.1109/jmems.2012.2203097

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