Waveguide-Based Phononic Crystal Micro/Nanomechanical High-$Q$ Resonators

Published 2012 View Full Article

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Title
Waveguide-Based Phononic Crystal Micro/Nanomechanical High-$Q$ Resonators
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 2, Pages 379-384
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2012-01-18
DOI
10.1109/jmems.2011.2174426

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