Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device

Title
Piezoresistivity Characterization of Synthetic Silicon Nanowires Using a MEMS Device
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 4, Pages 959-967
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-06-17
DOI
10.1109/jmems.2011.2153825

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