Diffusion-Limited Deposition of Parylene C

Published 2010 View Full Article

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Title
Diffusion-Limited Deposition of Parylene C
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 1, Pages 239-250
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-12-10
DOI
10.1109/jmems.2010.2090508

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