Characterization and Reduction of MEMS Sidewall Friction Using Novel Microtribometer and Localized Lubrication Method

Published 2011 View Full Article

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Title
Characterization and Reduction of MEMS Sidewall Friction Using Novel Microtribometer and Localized Lubrication Method
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 4, Pages 991-1000
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2011-07-12
DOI
10.1109/jmems.2011.2159094

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