A Miniature Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Photoacoustic Imaging

Title
A Miniature Capacitive Micromachined Ultrasonic Transducer Array for Minimally Invasive Photoacoustic Imaging
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 4, Pages 1002-1011
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-05-28
DOI
10.1109/jmems.2010.2049824

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