Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators

Title
Micromechanical IBARs: Tunable High-$Q$ Resonators for Temperature-Compensated Reference Oscillators
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 3, Pages 503-515
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-04-29
DOI
10.1109/jmems.2010.2044866

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