Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators

Title
Design, Fabrication, and Characterization of CMOS MEMS-Based Thermoelectric Power Generators
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 2, Pages 317-324
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-02-13
DOI
10.1109/jmems.2010.2041035

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