Analysis of Circular PDMS Microballoons With Ultralarge Deflection for MEMS Design

Published 2010 View Full Article

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Title
Analysis of Circular PDMS Microballoons With Ultralarge Deflection for MEMS Design
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 4, Pages 854-864
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-06-19
DOI
10.1109/jmems.2010.2049984

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