Novel Capacitive Pressure Sensor

Published 2010 View Full Article

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Title
Novel Capacitive Pressure Sensor
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 3, Pages 443-450
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2010-05-13
DOI
10.1109/jmems.2010.2047632

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