Planar Microassembly by Parallel Actuation of MEMS Microrobots

Published 2008 View Full Article

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Title
Planar Microassembly by Parallel Actuation of MEMS Microrobots
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 4, Pages 789-808
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-08-07
DOI
10.1109/jmems.2008.924251

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