Fracture Properties of Silicon Carbide Thin Films by Bulge Test of Long Rectangular Membrane

Published 2008 View Full Article

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Title
Fracture Properties of Silicon Carbide Thin Films by Bulge Test of Long Rectangular Membrane
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 2, Pages 453-461
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-04-10
DOI
10.1109/jmems.2008.916332

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