Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings

Published 2008 View Full Article

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Title
Design, Fabrication, and Characterization of a Rotary Micromotor Supported on Microball Bearings
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 3, Pages 632-642
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-06-11
DOI
10.1109/jmems.2008.916346
References
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