Determination of the Pull-Off Forces and Pull-Off Dynamics of an Electrostatically Actuated Silicon Disk

Published 2008 View Full Article

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Title
Determination of the Pull-Off Forces and Pull-Off Dynamics of an Electrostatically Actuated Silicon Disk
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 3, Pages 643-652
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-06-11
DOI
10.1109/jmems.2008.918396

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