Photolithographic Process for Integration of the Biopolymer Chitosan Into Micro/Nanostructures

Title
Photolithographic Process for Integration of the Biopolymer Chitosan Into Micro/Nanostructures
Authors
Keywords
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Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 2, Pages 402-409
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-04-10
DOI
10.1109/jmems.2008.916325

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