Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy

Title
Dynamic Operational Stress Measurement of MEMS Using Time-Resolved Raman Spectroscopy
Authors
Keywords
-
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 17, Issue 6, Pages 1315-1321
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-10-29
DOI
10.1109/jmems.2008.2004849

Ask authors/readers for more resources

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started