Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating

Published 2010 View Full Article

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Title
Microstructure and Mechanical Properties of Multilayer Ti(C, N) Films by Closed-field Unbalanced Magnetron Sputtering Ion Plating
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 26, Issue 2, Pages 119-124
Publisher
Elsevier BV
Online
2010-08-03
DOI
10.1016/s1005-0302(10)60019-9

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