Influence of fabrication parameters on crystallization, microstructure, and surface composition of NbN thin films deposited by rf magnetron sputtering

Published 2010 View Full Article

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Journal

JOURNAL OF MATERIALS SCIENCE

Volume 45, Issue 20, Pages 5528-5533

Publisher

Springer Nature

Online

2010-05-24

DOI

10.1007/s10853-010-4612-3

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