Plasma-based processes and thin film equipment for nano-scale device fabrication

Published 2010 View Full Article

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Title
Plasma-based processes and thin film equipment for nano-scale device fabrication
Authors
Keywords
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Journal
JOURNAL OF MATERIALS SCIENCE
Volume 46, Issue 1, Pages 1-37
Publisher
Springer Nature
Online
2010-11-03
DOI
10.1007/s10853-010-4974-6
References
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