Electromigration-induced strain relaxation in Cu conductor lines

Title
Electromigration-induced strain relaxation in Cu conductor lines
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS RESEARCH
Volume 26, Issue 04, Pages 498-502
Publisher
Cambridge University Press (CUP)
Online
2011-02-11
DOI
10.1557/jmr.2011.2

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