Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques

Title
Measuring the elastic modulus and residual stress of freestanding thin films using nanoindentation techniques
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS RESEARCH
Volume 24, Issue 09, Pages 2974-2985
Publisher
Cambridge University Press (CUP)
Online
2009-08-31
DOI
10.1557/jmr.2009.0360

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