Elastic modulus of low- k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

Published 2009 View Full Article

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Title
Elastic modulus of low- k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy
Authors
Keywords
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Journal
JOURNAL OF MATERIALS RESEARCH
Volume 24, Issue 09, Pages 2960-2964
Publisher
Cambridge University Press (CUP)
Online
2009-08-31
DOI
10.1557/jmr.2009.0357
References
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