TEM study on the electrical discharge machined surface of single-crystal silicon

Published 2012 View Full Article

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Title
TEM study on the electrical discharge machined surface of single-crystal silicon
Authors
Keywords
-
Journal
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 213, Issue 5, Pages 801-809
Publisher
Elsevier BV
Online
2012-12-07
DOI
10.1016/j.jmatprotec.2012.11.028

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