Characterization and Adhesion in Cu/Ru/SiO2/Si Multilayer Nano-scale Structure for Cu Metallization

Published 2012 View Full Article

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Title
Characterization and Adhesion in Cu/Ru/SiO2/Si Multilayer Nano-scale Structure for Cu Metallization
Authors
Keywords
advanced characterization, coatings, mechanical testing
Journal
JOURNAL OF MATERIALS ENGINEERING AND PERFORMANCE
Volume 22, Issue 4, Pages 1085-1090
Publisher
Springer Nature
Online
2012-09-07
DOI
10.1007/s11665-012-0359-0
References
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