A micropatterning technique to fabricate organic thin-film transistors on various substrates

Research and development of organic electronics have been expanded on various substrates, of which the silicon substrate is often used to evaluate organic semiconductors or/and prove concepts while flexible substrates are explored for further broad organic electronic applications. However, it is very challenging to have a low-cost manufacturing process applicable for different substrates. A micropatterning technique using SU-8 molds to spatially control oxygen-inhibition effect of photopolymerization of acrylate-based materials is presented here to inexpensively micropattern organic thin-film transistors (OTFTs) on different substrates. The process is further optimized for more effective oxygen-inhibition and better contact for the flexible and silicon substrates to fabricate OTFTs, demonstrating good performance and its applicability for various substrates. This economic micropatterning technique provides a great potential for broad organic electronic applications such as flexible display driving circuits and sensors.